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昆山熙日機械設備有限公司
昆山熙日機械設備有限公司
thyrcont圖拉特真空計VSR54E
thyrcont圖拉特真空計VSR54E
The combination of piezo and Pirani sensor in the digital VSR vacuum transducer with EtherCAT interface offers high precision and excellent resolution in the rough and fine vacuum range.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represent cutting edge technology providing safe, precise and cost effective process control.
描述
Wide measuring range due to combination sensor piezo / Pirani
High accuracy and optimal resolution over the whole measuring range
Excellent reproducibility and long term stability
Digital RS485 interface and EtherCAT
Automatic baud rate detection 9.6 kBd to 115 kBd
Two independent, potential-free relay switch points
Easily replaceable sensor heads with stored calibration data
應用
Load locks
Analysis technology
Coating plants
Vacuum furnaces
Leakages tests
Operational control of roughing pumps
Process engineering
技術參數
| WEIGHT | 0.220 kg |
|---|---|
| DIMENSIONS | 6.9 x 4.8 x 10.9 cm |
| MEASURING PRINCIPLE | Membran piezoresistiv / Pirani |
| MATERIALS IN CONTACT WITH VACUUM | Stainless steel 1.4307, nickel, gold, silicon oxide, tungsten, glass |
| MEASUREMENT RANGE | 1200 – 1e-4 mbar (900 – 1e-4 Torr), max. overpressure 4 bar abs. |
| ACCURACY | 1200 – 10 mbar: ±0.3% full scale 10 – 2e-3 mbar: ±10% from reading |
| REPEATABILITY | 1200-10 mbar: ±0,1 % full scale, 10-2e-3 mbar: ±2% from reading |
| REACTION TIME | 1200 – 10 mbar: < 30ms (piezo) 10 – 2e-3 mbar: < 100 ms (Pirani) |
| POWER SUPPLY | 20 – 30 VDC |
| ELECTRICAL CONNECTION | M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4 pol. |
| POWER CONSUMPTION | 2.5 W, additionally 0.8 W for EtherCAT / relays /LCD |
| OPERATING TEMPERATURE | +5…+60°C (rel. humidity max . 80% at 30°C noncondensing) |
| STORAGE TEMPERATURE | -40…+65°C |
| MAX. BAKE OUT TEMPERATURE | 125°C at the flange |
| SERIAL INTERFACE | RS485: 9.6 kBd to 115 kBd, address switch 1 – 16 |
| SWITCH POINT | 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA |
| VACUUM CONNECTION | DN 16 CF-F |
| PROTECTION CLASS | IP54 |
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